Research and application of aluminum nitride and aluminum nitride ceramics
Aluminum nitride (AlN) is a kind of integrated high performance new ceramic material, has excellent thermal conductivity, a reliable electrical insulation, low dielectric constant and dielectric loss, non-toxic and match the silicon thermal expansion coefficient, and a series of excellent features, is considered to be * * a high degree of the semiconductor substrate and the ideal of the electronics packaging materials, wide attention by the researchers at home and abroad. In theory, the thermal conductivity of AlN is [...]